Thin Solid Films · 1998 · 82 citations · 54 references
Natural SciencesChemistryPhysicsAnalytical ChemistrySpectroscopic AnalysisSpectroscopyInfrared SpectroscopyOptical SpectroscopyUltraviolet-visible SpectroscopySpectroscopic Ellipsometry
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High Precision Scanning Ellipsometer
D. E. Aspnes, A. A. Studna · Applied Optics · 1975 · 644 citations
Precision Bounds to Ellipsometer Systems
D. E. Aspnes · Applied Optics · 1975 · 268 citations