Concepedia

R. Hamasaki

RH

Statistics

Publications

5

Citations

107

H-Index

5

Active since

1983

Affiliations

Hitachi (Japan)(Current)

R. Hamasaki is an author at Hitachi (Japan) specializing in natural sciences, materials science, and materials engineering.

Publications per year

1983–1998

5

Publications

5

Model prediction of radical composition in plasmas and correlation with measured etch characteristics of silicon dioxide

Hideyuki Kazumi, R. Hamasaki, Kazutami Tago · Plasma Sources Science and Technology · 1996 · 30 citations

, , +17

Search for massive magnetic monopoles by plastic track detectors

T. Doke, T. Hayashi, R. Hamasaki et al. · Physics Letters B · 1983 · 29 citations

, , +9

Radical and Ion Compositions of BCl<sub>3</sub>/Cl<sub>2</sub> Plasma and Their Relation to Aluminum Etch Characteristics

Hideyuki Kazumi, R. Hamasaki, Kazutami Tago · Japanese Journal of Applied Physics · 1997 · 22 citations

, , +17

Near-surface interactions and their etching-reaction model in metal plasma-assisted etching

S. Tachi, Masaru Izawa, Kazunori Tsujimoto et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 15 citations

, , +17

Mechanism of CF Polymer Film Deposition through High-Aspect-Ratio SiO<sub>2</sub> Holes

Tetsuo Ono, R. Hamasaki, Tatsumi Mizutani · Japanese Journal of Applied Physics · 1994 · 11 citations

, , +14

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