Concepedia

R. Hamasaki

RH

Statistics

Publications

5

Citations

107

H-Index

5

Active since

1983

Affiliations

Hitachi (Japan)(Current)

R. Hamasaki is an author at Hitachi (Japan) specializing in applied physics, engineering, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial SciencePhysicsChemistrySurface ScienceMicroelectronicsMicrofabricationElectrical EngineeringPolymer Science

Publications per year

1983–1998

5

Publications

5

Model prediction of radical composition in plasmas and correlation with measured etch characteristics of silicon dioxide

Hideyuki Kazumi, R. Hamasaki, Kazutami Tago · Plasma Sources Science and Technology · 1996 · 30 citations

Radical Emission, Plasma Chemical Reactions, Engineering +17

Search for massive magnetic monopoles by plastic track detectors

T. Doke, T. Hayashi, R. Hamasaki et al. · Physics Letters B · 1983 · 29 citations

Physics, Plastic Track Detectors, Magnetic Resonance +4

Radical and Ion Compositions of BCl<sub>3</sub>/Cl<sub>2</sub> Plasma and Their Relation to Aluminum Etch Characteristics

Hideyuki Kazumi, R. Hamasaki, Kazutami Tago · Japanese Journal of Applied Physics · 1997 · 22 citations

Aluminium Nitride, Engineering, Chemistry +16

Near-surface interactions and their etching-reaction model in metal plasma-assisted etching

S. Tachi, Masaru Izawa, Kazunori Tsujimoto et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 15 citations

Materials Science, Near-surface Interactions, Electrical Engineering +15

Mechanism of CF Polymer Film Deposition through High-Aspect-Ratio SiO<sub>2</sub> Holes

Tetsuo Ono, R. Hamasaki, Tatsumi Mizutani · Japanese Journal of Applied Physics · 1994 · 11 citations

Engineering, Thin Film Process Technology, Plasma Processing +16

1–5 of 5