Concepedia

Hideyuki Kazumi

HK

Statistics

Publications

5

Citations

106

H-Index

5

Active since

1995

Affiliations

Hitachi (Japan)(Current)

Hideyuki Kazumi is an author at Hitachi (Japan) specializing in engineering, surface science, and applied physics.

Top concepts

EngineeringApplied PhysicsSurface ScienceChemistryMaterial ScienceMicroelectronicsMicrofabricationChemical KineticsMaterials EngineeringPhysics

Publications per year

1995–2003

5

Publications

5

Analysis of Plasma Chemical Reactions in Dry Etching of Silicon Dioxide

Hideyuki Kazumi, Kazutami Tago · Japanese Journal of Applied Physics · 1995 · 32 citations

Plasma Chemical Reactions, Engineering, Plasma Combustion +22

Model prediction of radical composition in plasmas and correlation with measured etch characteristics of silicon dioxide

Hideyuki Kazumi, R. Hamasaki, Kazutami Tago · Plasma Sources Science and Technology · 1996 · 30 citations

Radical Emission, Plasma Chemical Reactions, Engineering +17

Radical and Ion Compositions of BCl<sub>3</sub>/Cl<sub>2</sub> Plasma and Their Relation to Aluminum Etch Characteristics

Hideyuki Kazumi, R. Hamasaki, Kazutami Tago · Japanese Journal of Applied Physics · 1997 · 22 citations

Aluminium Nitride, Engineering, Chemistry +16

A plasma kinetics model: analysis of wall loss reactions in dry etching of silicon dioxide

Kazutami Tago, Hideyuki Kazumi, Kinya Kobayashi · Journal of Alloys and Compounds · 1998 · 11 citations

Materials Engineering, Engineering, Physics +12

A Novel Plasma Etching Tool with RF-Biased Faraday-Shield Technology: Chamber Surface Reaction Control in the Etching of Nonvolatile Materials

Manabu Edamura, Ken Yoshioka, Ryoji Nishio et al. · Japanese Journal of Applied Physics · 2003 · 11 citations

Engineering, Faraday Shield, Plasma Controllability +16

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