Aditya Agarwal

On the mechanism of the hydrogen-induced exfoliation of silicon

M. K. Weldon, Vittorio Marsico, Yves J. Chabal et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 307 citations

Natural Sciences, Materials Engineering, Materials Science +17

Efficient production of silicon-on-insulator films by co-implantation of He+ with H+

Aditya Agarwal, T. E. Haynes, V. C. Venezia et al. · Applied Physics Letters · 1998 · 125 citations

Natural Sciences, Materials Engineering, Materials Science +15

FinFET process refinements for improved mobility and gate work function engineering

Yang‐Kyu Choi, Leland Chang, P. Ranade et al. · 2003 · 105 citations

Engineering, Electrical Engineering, Materials Engineering +17

Effect of annealing environment on the memory properties of thin oxides with embedded Si nanocrystals obtained by low-energy ion-beam synthesis

P. Normand, E. Kapetanakis, Panagiotis Dimitrakis et al. · Applied Physics Letters · 2003 · 103 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Mechanism of silicon exfoliation induced by hydrogen/helium co-implantation

M. K. Weldon, M. Collot, Yves J. Chabal et al. · Applied Physics Letters · 1998 · 95 citations

Natural Sciences, Materials Engineering, Materials Science +15