Statistics
Publications
3
Citations
120
H-Index
3
Active since
2004
Affiliations
Hitachi (Japan)(Current)
Yoshinori Momonoi is an author at Hitachi (Japan) specializing in thin film etching, surface science, and materials engineering.
Publications per year
2004–2007
3
3
Deposition control for reduction of 193nm photoresist degradation in dielectric etching
Naoki Negishi, Hiroki Takesue, Masahiro Sumiya et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 70 citations
Natural Sciences, Materials Engineering, Materials Science +16
Dry cleaning technique for particle removal based on gas-flow and down-flow plasma
Yoshinori Momonoi, Ken’etsu Yokogawa, Masaru Izawa · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 10 citations
Natural Sciences, Materials Engineering, Materials Science +17
1–3 of 3