Mahmut S. Kavrik

Process integration and future outlook of 2D transistors

Kevin O’Brien, Carl H. Naylor, C. J. Dorow et al. · Nature Communications · 2023 · 110 citations · Full text

Low interface trap density in scaled bilayer gate oxides on 2D materials via nanofog low temperature atomic layer deposition

Iljo Kwak, Mahmut S. Kavrik, Jun Hong Park et al. · Applied Surface Science · 2018 · 37 citations

Materials Science, Engineering, Physics +8

Ultralow Defect Density at Sub-0.5 nm HfO₂/SiGe Interfaces via Selective Oxygen Scavenging

Mahmut S. Kavrik, Emily Thomson, Evgueni Chagarov et al. · ACS Applied Materials & Interfaces · 2018 · 36 citations

Exploring manufacturability of novel 2D channel materials: 300 mm wafer-scale 2D NMOS & PMOS using MoS₂, WS₂, & WSe₂

C. J. Dorow, T. Schram, Quentin Smets et al. · 2023 · 27 citations

Engineering High-<i>k</i>/SiGe Interface with ALD Oxide for Selective GeO<i>_x</i> Reduction

Mahmut S. Kavrik, Peter Ercius, Joanna Cheung et al. · ACS Applied Materials & Interfaces · 2019 · 23 citations · Full text