Low interface trap density in scaled bilayer gate oxides on 2D materials via nanofog low temperature atomic layer deposition

Iljo Kwak, Mahmut S. Kavrik, Jun Hong Park, Larry Grissom, Bernd Frühberger, Keith T. Wong, Sean Kang, Andrew C. Kummel

Applied Surface Science · 2018 · 38 citations · 26 references

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