Concepedia

Sascha Perlitz

SP

4

Publications

69

Citations

4

H-Index

2007

Active since

Affiliations

Carl Zeiss (Germany)(Current)

Sascha Perlitz is an author at Carl Zeiss (Germany) specializing in optoelectronics, electrical engineering, and optical measurement.

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Publications per year

2007–2016

4

Publications

4

AIMS EUV: the actinic aerial image review platform for EUV masks

Dirk Hellweg, Johannes Ruoff, Alois Herkommer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 28 citations

Novel solution for in-die phase control under scanner equivalent optical settings for 45nm node and below

Sascha Perlitz, Ute Buttgereit, Thomas Scherübl et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 14 citations

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Actinic review of EUV masks: first results from the AIMS EUV system integration

Markus R. Weiss, Dirk Hellweg, Jan Hendrik Peters et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 14 citations

Actinic review of EUV masks: performance data and status of the AIMS EUV System

Dirk Hellweg, Sascha Perlitz, Krister Magnusson et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 13 citations

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