Dirk Hellweg

High efficiency beam splitter for multifocal multiphoton microscopy

Tim Tolker‐Nielsen, M. Fricke, Dirk Hellweg et al. · Journal of Microscopy · 2001 · 141 citations

Photonics, Fluorescence Microscopy, Engineering +13

AIMS EUV: the actinic aerial image review platform for EUV masks

Dirk Hellweg, Johannes Ruoff, Alois Herkommer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 28 citations

Generation of arbitrary freeform source shapes using advanced illumination systems in high-NA immersion scanners

Jörg Zimmermann, Paul Gräupner, Jens Timo Neumann et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 25 citations

Engineering, Computer-aided Design, Biomedical Engineering +24

Actinic review of EUV masks: first results from the AIMS EUV system integration

Markus R. Weiss, Dirk Hellweg, Jan Hendrik Peters et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 14 citations

Actinic review of EUV masks: performance data and status of the AIMS EUV System

Dirk Hellweg, Sascha Perlitz, Krister Magnusson et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 13 citations