Statistics
Publications
12
Citations
466
H-Index
12
Active since
2005
Affiliations
Carl Zeiss (Germany)(Current)
Johannes Ruoff is an author at Carl Zeiss (Germany) specializing in engineering, optical properties, and ophthalmology.
Publications per year
2005–2013
12
12
Rigorous analysis of shadowing effects in blazed transmission gratings
Oliver Sandfuchs, Róbert Brunner, Daniel Pätz et al. · Optics Letters · 2006 · 30 citations
How to describe polarization influence on imaging
Michael Totzeck, Paul Gräupner, Tilmann Heil et al. · Optical Microlithography XVIII · 2005 · 29 citations
The impact of projection lens polarization properties on lithographic process at hyper-NA
Bernd Geh, Johannes Ruoff, Jörg Zimmermann et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 29 citations
Projection Lens Aberrations, Optical Materials, Engineering +18
1–5 of 12