Concepedia

Norbert Kerwien

NK

Statistics

Publications

4

Citations

193

H-Index

4

Active since

2005

Affiliations

Carl Zeiss (Germany)(Current)

University of Stuttgart

Norbert Kerwien is an author at Carl Zeiss (Germany) specializing in engineering, optical properties, and physics.

Top concepts

EngineeringOptical PropertiesPhysicsPhotonicsRadiologyMicroscopyOphthalmologyApplied PhysicsInstrumentationOptical Metrology

Publications per year

2005–2008

4

Publications

4

Normal vector method for convergence improvement using the RCWA for crossed gratings

Thomas Schuster, Johannes Ruoff, Norbert Kerwien et al. · Journal of the Optical Society of America A · 2007 · 156 citations

Numerical Analysis, Engineering, Convergence Improvement +19

Diffraction-induced coherence levels

Alexander V. Tavrov, Joanna Schmit, Norbert Kerwien et al. · Applied Optics · 2005 · 16 citations

Diffraction-induced Coherence Levels, Photonics, Engineering +13

Photomask registration and overlay metrology by means of 193 nm optics

Gerd Klose, Norbert Kerwien, Michael Arnz et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 11 citations

Optical Materials, Engineering, Electron-beam Lithography +26

PROVE: a photomask registration and overlay metrology system for the 45 nm node and beyond

Gerd Klose, Dirk Beyer, M. Arnz et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 10 citations

Engineering, Electron-beam Lithography, Microscopy +25

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