Concepedia

Michael Arnz

MA

Statistics

Publications

2

Citations

38

H-Index

2

Active since

1997

Affiliations

Carl Zeiss (Germany)(Current)

Michael Arnz is an author at Carl Zeiss (Germany) specializing in ophthalmology, optoelectronics, and optical systems.

Top concepts

Publications per year

1997–2008

2

Publications

2

Toward a comprehensive control of full-field image quality in optical photolithography

Donis G. Flagello, Jos de Klerk, Guy Davies et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1997 · 27 citations

, , +24

Photomask registration and overlay metrology by means of 193 nm optics

Gerd Klose, Norbert Kerwien, Michael Arnz et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 11 citations

, , +26

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