Concepedia

M. Arnz

MA

Statistics

Publications

2

Citations

20

H-Index

2

Active since

2008

Affiliations

Carl Zeiss (Germany)(Current)

M. Arnz is an author at Carl Zeiss (Germany) specializing in calibration, instrumentation, and ophthalmology.

Top concepts

Publications per year

2008–2011

2

Publications

2

PROVE: a photomask registration and overlay metrology system for the 45 nm node and beyond

Gerd Klose, Dirk Beyer, M. Arnz et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 10 citations

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In-die photomask registration and overlay metrology with PROVE using 2D correlation methods

Dirk Seidel, M. Arnz, Dirk Beyer · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 10 citations

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