P.F.H.M. van der Meulen

Statistics

Publications

Citations

101

H-Index

Active since

1988

Affiliations

Varian Medical Systems (United States)(Current)

Institute for Atomic and Molecular Physics

P.F.H.M. van der Meulen is an author at Varian Medical Systems (United States) specializing in ion implantation, engineering, and semiconductor devices.

Publications per year

1988–1992

Publications

Channeling implantation of B and P in silicon

R.J. Schreutelkamp, V. Raineri, F.W. Sans et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1991 · 28 citations

Engineering, Materials Engineering, Materials Science +9

Simultaneous energy and angle resolved ion scattering spectroscopy

P.A.J. Ackermans, P.F.H.M. van der Meulen, H. Ottevanger et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1988 · 24 citations

Natural Sciences, Chemistry, Physics +7

Trench sidewall implantation with a parallel scanned ion beam

R. Kakoschke, R.E. Kaim, P.F.H.M. van der Meulen et al. · IEEE Transactions on Electron Devices · 1990 · 21 citations

Engineering, Electrical Engineering, Materials Science +12

The role of extended defects on transient boron diffusion in ion-implanted silicon

R.J. Schreutelkamp, J. S. Custer, V. Raineri et al. · Materials Science and Engineering B · 1992 · 17 citations

Engineering, Materials Engineering, Materials Science +16

Energy contamination of P2+ ion beams on the Varian, EXTRION 220 medium current implanter

P.F.H.M. van der Meulen, S. Mehta, R.E. Kaim · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1991 · 11 citations

Engineering, Nuclear Engineering, Nuclear Instrumentation +9

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