Statistics
Publications
9
Citations
168
H-Index
9
Active since
1995
Affiliations
A. Gölz is an author at RWTH Aachen University specializing in engineering, applied physics, and materials science.
Publications per year
1995–1998
9
9
Plasma-assisted formation of low defect density SiC–SiO2 interfaces
A. Gölz, G. Lucovsky, K. Koh et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 20 citations · Full text
Materials Science, Semiconductor Technology, Vicinal Sic Wafers +11
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