Effects of Ar and H2 annealing on the electrical properties of oxides on 6H SiC - Concepedia

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Effects of Ar and H2 annealing on the electrical properties of oxides on 6H SiC

19

Citations

3

References

1995

Year

E. Stein von Kamienski, A. Gölz, H. Kurz

Materials Science and Engineering B

Materials ScienceMaterials EngineeringElectrical EngineeringEngineeringNanoelectronicsApplied PhysicsStructural CeramicMicroelectronicsElectrical PropertiesCarbide

References

	Year	Citations

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