Shuo Huang

A general memristor-based partial differential equation solver

Mohammed A. Zidan, YeonJoo Jeong, Jihang Lee et al. · Nature Electronics · 2018 · 258 citations

Engineering, Computer Engineering, Electrical Engineering +10

Plasma etching of high aspect ratio features in SiO2 using Ar/C4F8/O2 mixtures: A computational investigation

Shuo Huang, Chad M. Huard, Seung‐Bo Shim et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2019 · 120 citations

Natural Sciences, Materials Engineering, Materials Science +17

Calculated cross sections for electron collisions with NF₃, NF₂and NF with applications to remote plasma sources

James R. Hamilton, Jonathan Tennyson, Shuo Huang et al. · Plasma Sources Science and Technology · 2017 · 61 citations · Full text

Natural Sciences, Chemistry, Physics +17

Pattern dependent profile distortion during plasma etching of high aspect ratio features in SiO2

Shuo Huang, Seung‐Bo Shim, Sang Ki Nam et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2020 · 58 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Highly selective Si3N4/SiO2 etching using an NF3/N2/O2/H2 remote plasma. I. Plasma source and critical fluxes

Vladimir Volynets, Yuri Barsukov, Gonjun Kim et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2020 · 44 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +16