Sang Ki Nam

Plasma etching of high aspect ratio features in SiO2 using Ar/C4F8/O2 mixtures: A computational investigation

Shuo Huang, Chad M. Huard, Seung‐Bo Shim et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2019 · 106 citations

Ar/c4f8/o2 Mixtures, Engineering, Abundant Fluxes +21

Theory of Filamentary Plasma Array Formation in Microwave Breakdown at Near-Atmospheric Pressure

Sang Ki Nam, John Verboncoeur · Physical Review Letters · 2009 · 103 citations

Plasma Growth, Engineering, Physics +14

Global model for high power microwave breakdown at high pressure in air

Sang Ki Nam, John Verboncoeur · Computer Physics Communications · 2008 · 60 citations

Electrical Engineering, Engineering, Global Model +7

Effect of electron energy distribution function on the global model for high power microwave breakdown at high pressures

Sang Ki Nam, John Verboncoeur · Applied Physics Letters · 2008 · 54 citations

Hpm Breakdown, Electrical Engineering, Engineering +14

Pattern dependent profile distortion during plasma etching of high aspect ratio features in SiO2

Shuo Huang, Seung‐Bo Shim, Sang Ki Nam et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2020 · 51 citations · Full text

Electrical Engineering, Engineering, Physics +14