Concepedia

Masaki Minami

MM

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Publications

4

Citations

147

H-Index

4

Active since

2011

Affiliations

Nagoya University(Current)

Masaki Minami is an author at Nagoya University specializing in applied physics, electrical engineering, and engineering.

Top concepts

EngineeringApplied PhysicsElectrical EngineeringOptoelectronicsSurface ScienceMaterial ScienceMicroelectronicsOptical MaterialsPhysicsPlasma Theory

Publications per year

2011–2012

4

Publications

4

Analysis of GaN Damage Induced by Cl<sub>2</sub>/SiCl<sub>4</sub>/Ar Plasma

Masaki Minami, Shigetaka Tomiya, Kenji Ishikawa et al. · Japanese Journal of Applied Physics · 2011 · 48 citations

Gan-based Optical Devices, Electrical Engineering, Optical Materials +15

Structural and electrical characterization of HBr/O2 plasma damage to Si substrate

Masanaga Fukasawa, Yoshinori Nakakubo, Asahiko Matsuda et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2011 · 47 citations · Full text

Si Substrate, Engineering, Silicon On Insulator +18

Analysis of GaN Damage Induced by Cl<sub>2</sub>/SiCl<sub>4</sub>/Ar Plasma

Masaki Minami, Shigetaka Tomiya, Kenji Ishikawa et al. · Japanese Journal of Applied Physics · 2011 · 42 citations

Vacuum Ultraviolet and Ultraviolet Radiation-Induced Effect of Hydrogenated Silicon Nitride Etching: Surface Reaction Enhancement and Damage Generation

Masanaga Fukasawa, Yudai Miyawaki, Yusuke Kondo et al. · Japanese Journal of Applied Physics · 2012 · 10 citations

Ultraviolet Light, Optical Materials, Engineering +20

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