Statistics
Publications
45
Citations
1.6K
H-Index
23
Active since
1988
Affiliations
Hokkaido University(Current)
Masamichi Akazawa is an author at Hokkaido University specializing in engineering, materials science, and electronic materials.
Publications per year
1988–2022
45
45
Hideki Hasegawa, Masamichi Akazawa, Hirotatsu Ishii et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 106 citations
Hideki Hasegawa, Masamichi Akazawa, Ken-ichirou Matsuzaki et al. · Japanese Journal of Applied Physics · 1988 · 84 citations
Zenji Yatabe, Yujin Hori, Wancheng Ma et al. · Japanese Journal of Applied Physics · 2014 · 82 citations · Full text
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