K. van der Tak

Groups III and V impurity solubilities in silicon due to laser, flash, and solid-phase-epitaxial-regrowth anneals

Ray Duffy, T. Dao, Y. Tamminga et al. · Applied Physics Letters · 2006 · 57 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Doping fin field-effect transistor sidewalls: Impurity dose retention in silicon due to high angle incident ion implants and the impact on device performance

Ray Duffy, G. Curatola, B. J. Pawlak et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 43 citations · Full text

Engineering, Electrical Engineering, Impurity Profiling +16

Quantitative prediction of junction leakage in bulk-technology CMOS devices

Ray Duffy, A. Heringa, V. C. Venezia et al. · Solid-State Electronics · 2009 · 24 citations

Engineering, Computer Engineering, Electrical Engineering +16

Impurity redistribution due to recrystallization of preamorphized silicon

Ray Duffy, V. C. Venezia, K. van der Tak et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 15 citations

Natural Sciences, Materials Engineering, Materials Science +17