Concepedia
Statistics
Publications
13
Citations
413
H-Index
11
Active since
1994
Affiliations
Lawrence Livermore National Laboratory(Current)
Lawrence Berkeley National Laboratory
Intel (United States)
Sandia National Laboratories California
University of California, Berkeley
Layton C. Hale is an author at Lawrence Livermore National Laboratory specializing in optics, engineering, and physics.
Publications per year
1994–2012
Optimal design techniques for kinematic couplings
Layton C. Hale, Alexander H. Slocum · Precision Engineering · 2001 · 88 citations
Engineering, Mechanical Engineering, Systems Engineering +12
<title>System integration and performance of the EUV engineering test stand</title>
Daniel A. Tichenor, Avijit K. Ray-Chaudhuri, William C. Replogle et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 40 citations
Natural Sciences, Physics, Digital Imaging +7
Sub-70 nm extreme ultraviolet lithography at the Advanced Light Source static microfield exposure station using the engineering test stand set-2 optic
Patrick Naulleau, Kenneth A. Goldberg, Erik H. Anderson et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 38 citations
Natural Sciences, Electrical Engineering, Microfabrication +11
NuSTAR hard x-ray optics design and performance
Jason E. Koglin, Hongjun An, Kenneth L. Blaedel et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 37 citations · Full text
Natural Sciences, Astronomy, Physics +16
First lithographic results from the extreme ultraviolet Engineering Test Stand
Henry N. Chapman, Avijit K. Ray-Chaudhuri, Daniel A. Tichenor et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 37 citations
Engineering, Electrical Engineering, Optics +10
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