10
Publications
229
Citations
10
H-Index
2001
Active since
Kenneth L. Blaedel is an author at Lawrence Livermore National Laboratory specializing in engineering, instrumentation, and microscopy.
Top concepts
EngineeringInstrumentationMicroscopySynchrotron RadiationPhysicsRadiologyApplied PhysicsAstrophysicsOptoelectronicsDesign
Publications per year
2001–2011
10
10
<title>System integration and performance of the EUV engineering test stand</title>
Daniel A. Tichenor, Avijit K. Ray-Chaudhuri, William C. Replogle et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 40 citations
Engineering Test Stand, Engineering, Electron-beam Lithography +28
First lithographic results from the extreme ultraviolet Engineering Test Stand
Henry N. Chapman, Avijit K. Ray-Chaudhuri, Daniel A. Tichenor et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 37 citations
Materials Science, Ultraviolet Light, Engineering Test Stand +15
<title>Initial results from the EUV engineering test stand</title>
Daniel A. Tichenor, Avijit K. Ray-Chaudhuri, Sang Hun Lee et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 21 citations
Engineering Test Stand, Engineering, Electron-beam Lithography +18
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