P. ten Berge

On-product overlay enhancement using advanced litho-cluster control based on integrated metrology, ultra-small DBO targets and novel corrections

Kaustuve Bhattacharyya, Chih-Ming Ke, Guo-Tsai Huang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 26 citations

Advanced Packaging, System On Chip, Integrated Metrology +15

Oblique evaporation of Co<sub>80</sub>Ni<sub>20</sub> part II: continuously varying angle of vapour incidence

P. ten Berge, Léon Abelmann, Cock Lodder et al. · Journal of the Magnetics Society of Japan · 1994 · 18 citations · Full text

Engineering, Chemical Deposition, Magnetism +22

Spin-valve MR heads for tape and disk applications

P. ten Berge, N.J. Oliveira, T. S. Plaskett et al. · IEEE Transactions on Magnetics · 1995 · 17 citations

Spintronics, Spin-valve Sensors, Engineering +12

Overlay improvements using a real time machine learning algorithm

Emil Schmitt-Weaver, Michael Kubis, Wolfgang Henke et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 15 citations

Improvement of thermal stability and magnetoresistance recovery of Tb25Co75 biased spin-valve heads

N.J. Oliveira, J. L. Ferreira, J. Pinheiro et al. · Journal of Applied Physics · 1997 · 13 citations

Materials Science, Magnetism, Spintronics +13