P. Berruyer

Integrated RF-MEMS switch based on a combination of thermal and electrostatic actuation

Ph. Robert, D. Saias, C. Billard et al. · 2004 · 58 citations

Thermal Actuation, Electrical Engineering, Integrated Rf Microswitch +13

A DC to 100 GHz high performance ohmic shunt switch

Denis Mercier, P.L. Charvet, P. Berruyer et al. · 2004 · 46 citations

Low-power Electronics, Electrical Engineering, Engineering +9

Etch mechanisms of low dielectric constant polymers in high density plasmas: Impact of charging effects on profile distortion during the etching process

D. Fuard, O. Joubert, L. Vallier et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 35 citations

Engineering, Mechanical Engineering, Plasma Processing +16

A novel electrostatic actuator for micro deformable mirrors: fabrication and test

C. Divoux, J. Charton, Wesley G. Schwartz et al. · 2004 · 18 citations

Optical Materials, Engineering, Novel Electrostatic Actuator +24

Dielectric etching for 0.18 μm technologies

P. Berruyer, F. Vinet, H. Feldis et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 12 citations

Engineering, High Density Plasma, Plasma Physics +17