R. Shima

Interaction of metal layers with polycrystalline Si

Kunio Nakamura, J. O. Olowolafe, S. S. Lau et al. · Journal of Applied Physics · 1976 · 45 citations

Natural Sciences, Materials Engineering, Materials Science +17

Studies on the Al2O3−Ti−Mo−Au metallization system

J. M. Harris, E. Lugujjo, S. U. Campisano et al. · Journal of Vacuum Science and Technology · 1975 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +14

Influence of Ti, Fe, and Cu metal submicron-particles on diamond CVD on Si substrates

R. Shima, Y. Chakk, A. Hoffman · Carbon · 2000 · 19 citations

Natural Sciences, Materials Engineering, Materials Science +10

The effect of growth rate, diameter and impurity concentration on structure in Czochralski silicon crystal growth

T.G. Digges, R. Shima · Journal of Crystal Growth · 1980 · 12 citations

Natural Sciences, Materials Science, Crystal Structure +14

Role of embedded titanium nanoparticles for enhanced chemical vapor deposition diamond formation on silicon

R. Shima, Y. Chakk, M. Folman et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 10 citations

Natural Sciences, Materials Engineering, Materials Science +14