R. A. Ditizio

Short time electron cyclotron resonance hydrogenation of polycrystalline silicon thin-film transistor structures

R. A. Ditizio, G. Liu, Stephen J. Fonash et al. · Applied Physics Letters · 1990 · 78 citations

Electrical Engineering, Plasma Electronics, Engineering +14

Oxygen based electron cyclotron resonance etching of semiconducting homoepitaxial diamond films

Stephen Grot, R. A. Ditizio, G. Gildenblat et al. · Applied Physics Letters · 1992 · 21 citations

Materials Science, Materials Engineering, Electrical Engineering +14

Electronic states created in <i>p</i>-Si subjected to plasma etching: The role of inherent impurities, point defects, and hydrogen

Osama O. Awadelkarim, T. Gu, P. I. Mikulan et al. · Applied Physics Letters · 1993 · 20 citations

Point Defects, Engineering, Chemistry +20

Examination of the optimization of thin film transistor passivation with hydrogen electron cyclotron resonance plasmas

R. A. Ditizio, Stephen J. Fonash, B.-C. Hseih · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 15 citations

Electrical Engineering, Semiconductor Device, Engineering +11

Damage to Si substrates during SiO2 etching: A comparison of reactive ion etching and magnetron-enhanced reactive ion etching

Tieer Gu, R. A. Ditizio, Stephen J. Fonash et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 13 citations

Materials Engineering, Materials Science, Ion Implantation +14