Concepedia
Statistics
Publications
3
Citations
38
H-Index
Active since
2010
Affiliations
IMEC(Current)
Tokyo Electron (Japan)
Hideo Shite is an author at IMEC specializing in microelectronics, electrical engineering, and applied physics.
Top concepts
EngineeringApplied PhysicsMaterial ScienceMicroelectronicsElectrical EngineeringChemistryCorrosionPhotochemistryPolymer ScienceSurface Science
Publications per year
2010–2012
Understanding EUV resist dissolution characteristics and its impact to RLS limitations
Carlos Fonseca, Brian Head, Hideo Shite et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 15 citations
Engineering, Electron-beam Lithography, Rls Limitations +16
EUV RLS performance tradeoffs for a polymer bound PAG resist
Roel Gronheid, Alessandro Vaglio Pret, Benjamen M. Rathsack et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 13 citations
Materials Science, Electrical Engineering, Engineering +14
Latest cluster performance for EUV lithography
Hideo Shite, Koichi Matsunaga, Kathleen Nafus et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 10 citations
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