Concepedia
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Publications
1
Citations
15
H-Index
Active since
2011
Affiliations
IMEC(Current)
Brian Head is an author at IMEC specializing in microelectronics, materials engineering, and electrical engineering.
Top concepts
CorrosionEngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsElectronic PackagingElectrical InsulationMaterials EngineeringElectrical Engineering
Publications per year
2011–2011
Understanding EUV resist dissolution characteristics and its impact to RLS limitations
Carlos Fonseca, Brian Head, Hideo Shite et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 15 citations
Engineering, Electron-beam Lithography, Rls Limitations +16
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