Vu Luong

Characterization and mitigation of 3D mask effects in extreme ultraviolet lithography

Andreas Erdmann, Dongbo Xu, Peter Evanschitzky et al. · Advanced Optical Technologies · 2017 · 66 citations · Full text

Engineering, Biomedical Engineering, Digital Imaging +14

Ni-Al Alloys as Alternative EUV Mask Absorber

Vu Luong, Vicky Philipsen, Eric Hendrickx et al. · Applied Sciences · 2018 · 42 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +14

Statistical spectroscopy of switching traps in deeply scaled vertical poly-Si channel for 3D memories

M. Toledano-Luque, R. Degraeve, Ph. Roussel et al. · 2013 · 35 citations

Engineering, Electrical Engineering, Physics +17

Reducing EUV mask 3D effects by alternative metal absorbers

Vicky Philipsen, Vu Luong, Laurent Souriau et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 32 citations

Natural Sciences, Materials Engineering, Materials Science +17

Reducing extreme ultraviolet mask three-dimensional effects by alternative metal absorbers

Vicky Philipsen, Vu Luong, Laurent Souriau et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2017 · 28 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +15