Takeshi Onuma

Study of Encapsulants for Annealing Si‐Implanted GaAs

Takeshi Onuma, Takashi Hirao, Toshio Sugawa · Journal of The Electrochemical Society · 1982 · 39 citations

Engineering, Materials Engineering, Materials Science +16

New rapid thermal annealing for GaAs digital integrated circuits

Akiyoshi TAMURA, Takeshi Uenoyama, K. Nishii et al. · Journal of Applied Physics · 1987 · 20 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

Chemical State Depth Profile for GaAs Surface

Shigemi Kohiki, Kazue Oki, Takuichi Ohmura et al. · Japanese Journal of Applied Physics · 1984 · 16 citations

Engineering, Materials Engineering, Materials Science +15

SiF<i>x</i> and SF<i>x</i> molecular ion implantations into GaAs

Akiyoshi TAMURA, Kaoru Inoue, Takeshi Onuma et al. · Applied Physics Letters · 1987 · 15 citations

Engineering, Materials Engineering, Materials Science +14

High-transconductance enhancement-mode GaAs MESFET fabrication technology

Takeshi Onuma, A. Tamura, Takeshi Uenoyama et al. · IEEE Electron Device Letters · 1983 · 11 citations

Engineering, Electrical Engineering, Microelectronics +16