Pete Klimecky

Correlation between preirradiation channel mobility and radiation-induced interface-trap charge in metal-oxide-semiconductor transistors

John H. Scofield, Matthew L. Trawick, Pete Klimecky et al. · Applied Physics Letters · 1991 · 34 citations

Semiconductor Technology, Electrical Engineering, Preirradiation Channel Resistance +15

Sensor systems for real-time feedback control of reactive ion etching

Tyrone Eugene Benson, Leonard I. Kamlet, Steve Ruegsegger et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 29 citations

Electrical Engineering, Sensor Systems, Engineering +14

In-situ spectroscopic reflectometry for polycrystalline silicon thin film etch rate determination during reactive ion etchinc

Tyrone Eugene Benson, Leonard I. Kamlet, Pete Klimecky et al. · Journal of Electronic Materials · 1996 · 26 citations

Materials Science, Engineering, Analytical Instrumentation +9

Compensation for transient chamber wall condition using real-time plasma density feedback control in an inductively coupled plasma etcher

Pete Klimecky, Jessy W. Grizzle, Fred L. Terry · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 25 citations

Electron Density, Electrical Engineering, Plasma Electronics +10

<i>In situ</i>measurements of HCl during plasma etching of poly-silicon using a diode laser absorption sensor

Suhong Kim, Pete Klimecky, Jay B. Jeffries et al. · Measurement Science and Technology · 2003 · 23 citations · Full text