Concepedia

Leonard I. Kamlet

LI

2

Publications

55

Citations

2

H-Index

1996

Active since

Affiliations

University of Michigan(Current)

Leonard I. Kamlet is an author at University of Michigan specializing in instrumentation, engineering, and applied physics.

Top concepts

EngineeringSpectroscopyApplied PhysicsInstrumentationSensorsSensor DesignSensor SystemsSurface ScienceMaterial ScienceMicroelectronics

Publications per year

1996–1996

2

Publications

2

Sensor systems for real-time feedback control of reactive ion etching

Tyrone Eugene Benson, Leonard I. Kamlet, Steve Ruegsegger et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 29 citations

Electrical Engineering, Sensor Systems, Engineering +14

In-situ spectroscopic reflectometry for polycrystalline silicon thin film etch rate determination during reactive ion etchinc

Tyrone Eugene Benson, Leonard I. Kamlet, Pete Klimecky et al. · Journal of Electronic Materials · 1996 · 26 citations

Materials Science, Engineering, Analytical Instrumentation +9

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