Concepedia

Steve Ruegsegger

SR

Statistics

Publications

2

Citations

56

H-Index

2

Active since

1996

Affiliations

University of Michigan(Current)

Steve Ruegsegger is an author at University of Michigan specializing in engineering, mechatronics, and systems engineering.

Top concepts

Publications per year

1996–1999

2

Publications

2

Sensor systems for real-time feedback control of reactive ion etching

Tyrone Eugene Benson, Leonard I. Kamlet, Steve Ruegsegger et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 29 citations

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Feedforward control for reduced run-to-run variation in microelectronics manufacturing

Steve Ruegsegger, Aaron B. Wagner, J.S. Freudenberg et al. · IEEE Transactions on Semiconductor Manufacturing · 1999 · 27 citations

, , +14

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