Concepedia

Tyrone Eugene Benson

TE

2

Publications

55

Citations

2

H-Index

1996

Active since

Affiliations

University of Michigan(Current)

Tyrone Eugene Benson is an author at University of Michigan specializing in instrumentation, spectroscopy, and engineering.

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Publications per year

1996–1996

2

Publications

2

Sensor systems for real-time feedback control of reactive ion etching

Tyrone Eugene Benson, Leonard I. Kamlet, Steve Ruegsegger et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 29 citations

, , +14

In-situ spectroscopic reflectometry for polycrystalline silicon thin film etch rate determination during reactive ion etchinc

Tyrone Eugene Benson, Leonard I. Kamlet, Pete Klimecky et al. · Journal of Electronic Materials · 1996 · 26 citations

, , +9

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