Concepedia

A. Bertz

AB

9

Publications

182

Citations

9

H-Index

1995

Active since

Affiliations

Chemnitz University of Technology(Current)

A. Bertz is an author at Chemnitz University of Technology specializing in engineering, materials science, and electronic packaging.

Top concepts

EngineeringMaterial ScienceApplied PhysicsMicrofabricationElectronic PackagingElectrical EngineeringMicroelectronicsMaterials EngineeringPolymer ScienceSurface Science

Publications per year

1995–2011

9

Publications

9

A novel high aspect ratio technology for MEMS fabrication using standard silicon wafers

A. Bertz, Matthias Küchler, R. Knöfler · Sensors and Actuators A Physical · 2002 · 52 citations

Electrical Engineering, Wafer Scale Processing, Engineering +10

Copper-based metallization for ULSI circuits

J. Torrès, J.L. Mermet, R. Madar et al. · Microelectronic Engineering · 1996 · 23 citations

Materials Engineering, Materials Science, Ulsi Circuits +6

Effects of the biasing frequency on RIE of Cu in a Cl2-based discharge

A. Bertz, T. Werner, Norbert Hille · Applied Surface Science · 1995 · 20 citations

Materials Science, Electrical Engineering, Cl2-based Discharge +5

Electrical and adhesion properties of plasma-polymerised ultra-low k dielectric films with high thermal stability

M. Uhlig, A. Bertz, M. Rennau et al. · Microelectronic Engineering · 2000 · 20 citations

Materials Science, High Thermal Stability, Electrical Engineering +10

Thin film encapsulation technology for harms using sacrificial CF-polymer

Danny Reuter, A. Bertz, M. Nowack · Sensors and Actuators A Physical · 2007 · 17 citations

Materials Science, Engineering, Polymer Technology +5

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