Concepedia

R. Knöfler

RK

4

Publications

122

Citations

4

H-Index

1999

Active since

Affiliations

Chemnitz University of Technology(Current)

R. Knöfler is an author at Chemnitz University of Technology specializing in engineering, microelectronics, and applied physics.

Top concepts

EngineeringApplied PhysicsMicroelectronicsMaterial ScienceElectrical EngineeringCorrosionTechnologyMicrostructureData ManagementMicrofabrication

Publications per year

1999–2008

4

Publications

4

A novel high aspect ratio technology for MEMS fabrication using standard silicon wafers

A. Bertz, Matthias Küchler, R. Knöfler · Sensors and Actuators A Physical · 2002 · 52 citations

Electrical Engineering, Wafer Scale Processing, Engineering +10

A detailed comparison between the amorphous and the quasicrystalline state of Al–Cu–Fe

Connie Roth, G Schwalbe, R. Knöfler et al. · Journal of Non-Crystalline Solids · 1999 · 40 citations

Materials Science, Engineering, Applied Physics +8

TaN metal gate damage during high-k (Al2O3) high-temperature etch

V. Beyer, M. Florian Beug, L. Bach et al. · Microelectronic Engineering · 2008 · 15 citations · Full text

Materials Engineering, Materials Science, Aluminium Nitride +7

A 512 Mb NROM flash data storage memory with 8 MB/s data rate

E. Maayan, R. Dvir, Joseph Shor et al. · 2002 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.02CH37315) · 2003 · 15 citations

Hardware Security, Electrical Engineering, Engineering +13

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