M. Florian Beug

Traceable dynamic measurement of mechanical quantities: objectives and first results of this european project

Carlo Bartoli, M. Florian Beug, Thomas D. Bruns et al. · International Journal of Metrology and Quality Engineering · 2012 · 63 citations · Full text

Mechanical Quantities, Engineering, Measurement +23

New Materials in Memory Development Sub 50 nm: Trends in Flash and DRAM

K.‐H. Kuesters, M. Florian Beug, Uwe Schroeder et al. · Advanced Engineering Materials · 2009 · 37 citations

Materials Science, Non-volatile Memory, Electrical Engineering +15

Investigation of Program Saturation in Scaled Interpoly Dielectric Floating-Gate Memory Devices

M. Florian Beug, N. Chan, Timm Hoehr et al. · IEEE Transactions on Electron Devices · 2009 · 24 citations

Device Modeling, Non-volatile Memory, Electrical Engineering +12

TaN metal gate damage during high-k (Al2O3) high-temperature etch

V. Beyer, M. Florian Beug, L. Bach et al. · Microelectronic Engineering · 2008 · 15 citations · Full text

Materials Engineering, Materials Science, Aluminium Nitride +7

Analysis of TANOS Memory Cells With Sealing Oxide Containing Blocking Dielectric

M. Florian Beug, T. Melde, M. Czernohorsky et al. · IEEE Transactions on Electron Devices · 2010 · 14 citations · Full text

Materials Science, Additional Silicon, Electrical Engineering +15