Concepedia

Copper-based metallization for ULSI circuits

J. Torrès, J.L. Mermet, R. Madar, G.M. Crean, A. Bertz, Matthias Plötner, F. Binder, D. Save

Microelectronic Engineering · 1996 · 23 citations · 0 references

Concepts

Materials EngineeringMaterials ScienceUlsi CircuitsEngineeringMetallurgical SystemMetallurgical InteractionElectronic PackagingMicroelectronicsElemental Metal