Concepedia

Takanori Kido

TK

Statistics

Publications

4

Citations

86

H-Index

4

Active since

2005

Affiliations

National Institute of Advanced Industrial Science and Technology(Current)

Takanori Kido is an author at National Institute of Advanced Industrial Science and Technology specializing in surface science, materials science, and materials engineering.

Publications per year

2005–2016

4

Publications

4

Micro-structural analysis of local damage introduced in subsurface regions of 4H-SiC wafers during chemo-mechanical polishing

Hideki Sako, Hirofumi Matsuhata, Masayuki Sasaki et al. · Journal of Applied Physics · 2016 · 34 citations

, , +17

Microstructural Analysis of Damaged Layer Introduced during Chemo-Mechanical Polishing

Hideki Sako, Tamotsu Yamashita, Kentaro Tamura et al. · Materials science forum · 2014 · 26 citations · Full text

, , +17

Frictional and Removal Rate Studies of Silicon Dioxide and Silicon Nitride CMP Using Novel Cerium Dioxide Abrasive Slurries

Yun Zhuang, Deanna King, Takanori Kido et al. · Japanese Journal of Applied Physics · 2005 · 13 citations

, , +17

A Novel Grinding Technique for 4H-SiC Single-Crystal Wafers Using Tribo-Catalytic Abrasives

Takanori Kido, Masatake Nagaya, Kenji Kawata et al. · Materials science forum · 2014 · 13 citations · Full text

, , +17

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