Concepedia

Masatake Nagaya

MN

Statistics

Publications

3

Citations

73

H-Index

3

Active since

2014

Affiliations

National Institute of Advanced Industrial Science and Technology(Current)

Masatake Nagaya is an author at National Institute of Advanced Industrial Science and Technology specializing in materials engineering, surface science, and materials science.

Publications per year

2014–2016

3

Publications

3

Micro-structural analysis of local damage introduced in subsurface regions of 4H-SiC wafers during chemo-mechanical polishing

Hideki Sako, Hirofumi Matsuhata, Masayuki Sasaki et al. · Journal of Applied Physics · 2016 · 34 citations

, , +17

Microstructural Analysis of Damaged Layer Introduced during Chemo-Mechanical Polishing

Hideki Sako, Tamotsu Yamashita, Kentaro Tamura et al. · Materials science forum · 2014 · 26 citations · Full text

, , +17

A Novel Grinding Technique for 4H-SiC Single-Crystal Wafers Using Tribo-Catalytic Abrasives

Takanori Kido, Masatake Nagaya, Kenji Kawata et al. · Materials science forum · 2014 · 13 citations · Full text

, , +17

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