Kuen-Yu Tsai

Servo system design of a high-resolution piezo-driven fine stage for step-and-repeat microlithography systems

Kuen-Yu Tsai, Jia‐Yush Yen · 2003 · 22 citations

Engineering, Servo System Design, Mechanical Engineering +22

Heavy metal incorporated helium ion active hybrid non-chemically amplified resists: Nano-patterning with low line edge roughness

Pulikanti Guruprasad Reddy, Neha Thakur, Chien-Lin Lee et al. · AIP Advances · 2017 · 12 citations · Full text

Engineering, Electron-beam Lithography, Helium Ion +18

Impacts of point spread function accuracy on patterning prediction and proximity effect correction in low-voltage electron-beam–direct-write lithography

Chun-Hung Liu, Philip C. W. Ng, Yu-Tian Shen et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2013 · 11 citations

Psf Accuracy, Electrical Engineering, Engineering +11

Model-based proximity effect correction for electron-beam direct-write lithography

Chun-Hung Liu, Pei-Lin Tien, Philip C. W. Ng et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 10 citations

Architecture for next-generation massively parallel maskless lithography system (MPML2)

Ming-Shing Su, Kuen-Yu Tsai, Yi-Chang Lu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 10 citations

Electrical Engineering, Wafer Scale Processing, Engineering +13