Concepedia

Yu-Tian Shen

YS

Statistics

Publications

2

Citations

21

H-Index

2

Active since

2010

Affiliations

National Taiwan University(Current)

Yu-Tian Shen is an author at National Taiwan University specializing in engineering, applied physics, and electrical engineering.

Top concepts

Publications per year

2010–2013

2

Publications

2

Impacts of point spread function accuracy on patterning prediction and proximity effect correction in low-voltage electron-beam–direct-write lithography

Chun-Hung Liu, Philip C. W. Ng, Yu-Tian Shen et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2013 · 11 citations

, , +11

Model-based proximity effect correction for electron-beam direct-write lithography

Chun-Hung Liu, Pei-Lin Tien, Philip C. W. Ng et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 10 citations

1–2 of 2