Concepedia

Tom Laidig

TL

2

Publications

32

Citations

2

H-Index

1997

Active since

Affiliations

Micro Systems Engineering (United States)(Current)

Tom Laidig is an author at Micro Systems Engineering (United States) specializing in computational imaging, optical systems, and optical tolerancing.

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Publications per year

1997–2005

2

Publications

2

Optical proximity correction for intermediate-pitch features using sub-resolution scattering bars

J. Fung Chen, Tom Laidig, Kurt E. Wampler et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 21 citations

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RET masks for the final frontier of optical lithography

J. F. Chen, Douglas Van Den Broeke, Stephen Hsu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 11 citations

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