J. Fung Chen

Publications

Citations

H-Index

1997

Active since

Affiliations

Micro Systems Engineering (United States)(Current)

J. Fung Chen is an author at Micro Systems Engineering (United States) specializing in computational imaging, optical systems, and optical tolerancing.

Top concepts

PhysicsPhotonicsEngineeringNanophotonicsOptical SystemsSuper-resolutionOptical MetrologyOrganic PhotonicsOptical PropertiesOptical Engineering

Publications per year

1997–1997

Publications

Optical proximity correction for intermediate-pitch features using sub-resolution scattering bars

J. Fung Chen, Tom Laidig, Kurt E. Wampler et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 21 citations

Engineering, Optic Design, Optical Testing +18

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