Concepedia

Kiyomi Koyama

KK

Statistics

Publications

3

Citations

55

H-Index

3

Active since

1993

Affiliations

Toshiba (Japan)(Current)

Kiyomi Koyama is an author at Toshiba (Japan) specializing in engineering, computer engineering, and physical design.

Publications per year

1993–1999

3

Publications

3

Computer Aided Design Software for Designing Phase-Shifting Masks

Kazuko Ooi, Shigehiro Hara, Kiyomi Koyama · Japanese Journal of Applied Physics · 1993 · 28 citations

, , +11

Large-Area Optical Proximity Correction with a Combination of Rule-Based and Simulation-Based Methods

Sachiko Miyama Sachiko Miyama, Kazuko Yamamoto, Kiyomi Koyama · Japanese Journal of Applied Physics · 1996 · 16 citations

, , +12

Advanced electron-beam writing system EX-11 for next-generation mask fabrication

Toru Tojo, Ryoji Yoshikawa, Yoji Ogawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 11 citations

, , +9

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