Yi Hu

<i>In situ</i> real-time studies of nickel silicide phase formation

M. Tinani, A. H. Mueller, Yan-Hong Gao et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 70 citations

Real-time Ellipsometry Data, Optical Materials, Engineering +17

XPS and AFM study of chemical mechanical polishing of silicon nitride

G.‐R. Yang, Yiping Zhao, Yi Hu et al. · Thin Solid Films · 1998 · 66 citations

Materials Science, Engineering, Material Processing +11

Silicon Nitride Chemical Mechanical Polishing Mechanisms

Yi Hu, R.J. Gutmann, T. Paul Chow · Journal of The Electrochemical Society · 1998 · 60 citations

Engineering, Mechanical Engineering, Chemistry +18

A kinetics study of the electron cyclotron resonance plasma oxidation of silicon

J. Joseph, Yi Hu, E. A. Irene · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 49 citations

Electrical Engineering, Engineering, Physics +13

<i>In</i> <i>situ</i> spectroscopic ellipsometry study of the electron cyclotron resonance plasma oxidation of silicon and interfacial damage

Yi Hu, J. Joseph, E. A. Irene · Applied Physics Letters · 1991 · 38 citations

Engineering, Oxidation Resistance, Ellipsometry Study +18