Publication | Closed Access
XPS and AFM study of chemical mechanical polishing of silicon nitride
66
Citations
8
References
1998
Year
Materials ScienceEngineeringMaterial ProcessingCorrosionSurface ScienceApplied PhysicsChemical Mechanical PolishingSurface TreatmentAfm StudySurface PolishingPlasma EtchingSurface ProcessingMicrostructureSilicon Nitride
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