38
Publications
981
Citations
19
H-Index
1989
Active since
G.‐R. Yang is an author at Rensselaer Polytechnic Institute specializing in engineering, materials science, and surface science.
Top concepts
EngineeringMaterial ScienceSurface ScienceApplied PhysicsThin FilmsChemistryPolymer SciencePolymer ChemistryMaterials EngineeringElectronic Materials
Publications per year
1989–2018
38
38
XPS and AFM study of chemical mechanical polishing of silicon nitride
G.‐R. Yang, Yiping Zhao, Yi Hu et al. · Thin Solid Films · 1998 · 66 citations
Stress in thermally annealed parylene films
S. Dabral, J. Van Etten, Xinshu Zhang et al. · Journal of Electronic Materials · 1992 · 52 citations
Materials Science, Materials Engineering, Material Analysis +5
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