Concepedia

Nicole Ahner

NA

Statistics

Publications

6

Citations

102

H-Index

6

Active since

1993

Affiliations

Chemnitz University of Technology(Current)

Fraunhofer Institute for Electronic Nano Systems

GlobalFoundries (Germany)

Nicole Ahner is an author at Chemnitz University of Technology specializing in engineering, chemical engineering, and chemical kinetics.

Top concepts

EngineeringChemical EngineeringChemistryMaterial ScienceChemical KineticsPhysicsSecurityMagnetismRegulationTechnology

Publications per year

1993–2012

6

Publications

6

Analysis of the impact of different additives during etch processes of dense and porous low-k with OES and QMS

Sven Zimmermann, Nicole Ahner, F. Blaschta et al. · Microelectronic Engineering · 2009 · 22 citations

Materials Science, Materials Engineering, Chemical Engineering +10

Piezoelectrically Assisted Ultrafiltration

Nicole Ahner, D.E. Gottschlich, S. Narang et al. · Separation Science and Technology · 1993 · 19 citations

Chemical Engineering, Membrane Technology, Engineering +9

Thermal stability and gap-fill properties of spin-on MSQ low-k dielectrics

Nicole Ahner, Stefan E. Schulz, F. Blaschta et al. · Microelectronic Engineering · 2007 · 18 citations

Magnetism, Spintronics, Engineering +9

A New EU Gas Security of Supply Architecture?

Jacques de Jong, Jean‐Michel Glachant, Manfred Häfner et al. · European Energy & Climate Journal · 2012 · 16 citations

Gas Field Development, Engineering, Industrial Engineering +9

Influence of the additives argon, O2, C4F8, H2, N2 and CO on plasma conditions and process results during the etch of SiCOH in CF4 plasma

Sven Zimmermann, Nicole Ahner, F. Blaschta et al. · Microelectronic Engineering · 2010 · 16 citations

Chemical Engineering, Plasma Conditions, Plasma Combustion +6

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