Concepedia

Author

Nicole Ahner

Chemnitz University of Technology

Also Known As

N. Ahner, Nicole Ahner

51

Publications

158

Citations

6

H-Index

25

Concepts

All Affiliations

Chemnitz University of TechnologyFraunhofer Institute for Electronic Nano SystemsGlobalFoundries (Germany)
NA

About

Nicole Ahner is an author at Chemnitz University of Technology specializing in engineering, chemical engineering, and chemical kinetics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

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5

86

2

Chemical Engineering

3

3

57

3

Chemistry

2

2

27

4

Applied Physics

1

1

18

5

Environmental Engineering

1

1

19

Nicole Ahner

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6

Publications

102

Citations

6

H-Index

YearCitations

Analysis of the impact of different additives during etch processes of dense and porous low-k with OES and QMS

Sven Zimmermann, Nicole Ahner, F. Blaschta,

Microelectronic Engineering

2009

22

Piezoelectrically Assisted Ultrafiltration

Nicole Ahner, D.E. Gottschlich, S. Narang,

Separation Science and Technology

1993

19

Thermal stability and gap-fill properties of spin-on MSQ low-k dielectrics

Nicole Ahner, Stefan E. Schulz, F. Blaschta,

Microelectronic Engineering

2007

18

A New EU Gas Security of Supply Architecture?

Jacques de Jong, Jean‐Michel Glachant, Manfred Häfner,

European Energy & Climate Journal

2012

16

Influence of the additives argon, O2, C4F8, H2, N2 and CO on plasma conditions and process results during the etch of SiCOH in CF4 plasma

Sven Zimmermann, Nicole Ahner, F. Blaschta,

Microelectronic Engineering

2010

16

Influence of thermal cycles on the silylation process for recovering k-value and chemical structure of plasma damaged ultra-low-k materials

Tobias Fischer, Nicole Ahner, Sven Zimmermann,

Microelectronic Engineering

2011

11

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